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Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate
- Authors
- Jung, Y.S.; Park, Y.S.; Lee, W.-J.; Kim, K.H.
- Issue Date
- Feb-2013
- Publisher
- 한국전기전자재료학회
- Keywords
- AZO/Ag/AZO; Facing target sputtering; Multilayer; Polyethersulfone
- Citation
- Transactions on Electrical and Electronic Materials, v.14, no.1, pp.9 - 11
- Journal Title
- Transactions on Electrical and Electronic Materials
- Volume
- 14
- Number
- 1
- Start Page
- 9
- End Page
- 11
- ISSN
- 1229-7607
- Abstract
- The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages, such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 Ω/□ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer. © 2013 KIEEME. All rights reserved.
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Collections - IT융합대학 > 전자공학과 > 1. Journal Articles
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Related Researcher
- Park, Yong Seo
- IT (Department of Electrical Engineering)