Characteristics of AZO/Cu/AZO Multilayer Thin Films Prepared on Polyethersulfone Substrate at Room Temperature

Abstract

Highly conducting Al doped ZnO(AZO)/Cu/AZO triple multilayer thin films were deposited on polyethersulfonesusbtrate at room temperature. We investigated the structural, electrical, optical, and mechanical properties of triple multilayers as a function thickness of Cu layers. The triple multilayer with flexible substrate had advantages such as low sheet resistance and stable mechanical properties as compared with single oxide layer. From the results, sheet resistance value of AZO(50 nm)/Cu(9 nm)/AZO(50 nm) multilayer was 12 Omega/square, and average optical transmittance(380-770 nm) value of multilayer was 80%. Moreover the triple multilayer showed mechanical flexural strength properties than single-layered AZO thin films during bending test due to the existence of ductile Cu metal layer.