Characteristics of AZO/Cu/AZO Multilayer Thin Films Prepared on Polyethersulfone Substrate at Room Temperature
- Authors
- Jung, Yu Sup; Bark, Chung Wung; Choi, Hyung-Wook; Kim, Kyung Hwan
- Issue Date
- 2012
- Publisher
- TAYLOR & FRANCIS LTD
- Keywords
- AZO/Cu/AZO; FTS; Triple multilayer
- Citation
- MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.564, pp.121 - 129
- Journal Title
- MOLECULAR CRYSTALS AND LIQUID CRYSTALS
- Volume
- 564
- Start Page
- 121
- End Page
- 129
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/17565
- DOI
- 10.1080/15421406.2012.691702
- ISSN
- 1542-1406
- Abstract
- Highly conducting Al doped ZnO(AZO)/Cu/AZO triple multilayer thin films were deposited on polyethersulfonesusbtrate at room temperature. We investigated the structural, electrical, optical, and mechanical properties of triple multilayers as a function thickness of Cu layers. The triple multilayer with flexible substrate had advantages such as low sheet resistance and stable mechanical properties as compared with single oxide layer. From the results, sheet resistance value of AZO(50 nm)/Cu(9 nm)/AZO(50 nm) multilayer was 12 Omega/square, and average optical transmittance(380-770 nm) value of multilayer was 80%. Moreover the triple multilayer showed mechanical flexural strength properties than single-layered AZO thin films during bending test due to the existence of ductile Cu metal layer.
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Collections - IT융합대학 > 전기공학과 > 1. Journal Articles
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