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Effect of Post Annealing in Various Atmospheric Environment Applied to ZnO:Ga Films
- Issue Date
- 2012
- Publisher
- TAYLOR & FRANCIS LTD
- Keywords
- ZnO; ZnO:Ga; Solar Cell; OLED; Vacuum Heat treatment; Oxidation
- Citation
- MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.564, pp.113 - 120
- Journal Title
- MOLECULAR CRYSTALS AND LIQUID CRYSTALS
- Volume
- 564
- Start Page
- 113
- End Page
- 120
- ISSN
- 1542-1406
- Abstract
- In this study, transparent conductive films (TCO) of ZnO:Ga (GZO) were deposited by facing target sputtering to explore the effect of post-annealing on the structural, electrical and optical properties of the films. As deposited films have been annealed to each different temperature condition in various atmosphere environments (air, N-2, Vacuum N-2). In the result, in air atmosphere condition, ZnO:Ga films have lost their characteristics as TCO films, because rapid oxidation occurred over 300 degrees C. But in other atmosphere condition, contacting with oxygen is reduced more, as rapid rise of resistivity has been prevented.
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Related Researcher
- Choi, Hyung Wook
- College of IT Convergence (Department of Electrical Engineering)