Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
고전도성 투명전극인 ITO/Ag/ITO 다층박막에 관한 광학적 분석Optical Analysis of the ITO/Ag/ITO Multiple Layers as a Highly Conductive Transparent Electrode
- Other Titles
- Optical Analysis of the ITO/Ag/ITO Multiple Layers as a Highly Conductive Transparent Electrode
- Issue Date
- 2019
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Transparent conductive oxide; Multilayers; ITO/Ag/ITO; In-line sputtering; Full-wave simulation
- Citation
- 반도체디스플레이기술학회지, v.18, no.1, pp.87 - 91
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 18
- Number
- 1
- Start Page
- 87
- End Page
- 91
- ISSN
- 1738-2270
- Abstract
- As a highly conductive and transparent electrode, ITO/Ag/ITO multilayers are fabricated using an in-line sputtering method. Optimal thickness conditions have been investigated in terms of the optical transmittance and the electrical conductance. Considering the optical properties, in this study, the experimental characteristics are analyzed based on theoretical phenomena, and they are compared with the simulated results. The simulations are based on the finite-difference-time-domain (FDTD) method in solving linear Maxwell equations. Consequently, the results showed that ITO/Ag/ITO multilayer structures with respective thicknesses of 39.2 nm/10.7 nm/39.2 nm are most suitable with an average transmittance of about 87% calculated for wavelengths ranging from 400–800 nm and a sheet resistance of about 7.1 .
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - IT융합대학 > 전자공학과 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.