Effect of post-annealing on structural and electrochemical properties of lithium phosphorus oxynitride thin film
- Authors
- Ko, Jaehwan; Yoon, Young Soo
- Issue Date
- Jun-2020
- Publisher
- ELSEVIER SCI LTD
- Keywords
- Electrochemical properties; LiPON thin film; Post-annealing; Structural properties; Thin film electrolyte
- Citation
- Ceramics International, v.46, no.9, pp.14071 - 14077
- Journal Title
- Ceramics International
- Volume
- 46
- Number
- 9
- Start Page
- 14071
- End Page
- 14077
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/26358
- DOI
- 10.1016/j.ceramint.2020.02.207
- ISSN
- 0272-8842
- Abstract
- In this study, the structural and electrochemical properties of post-annealed lithium phosphorus oxynitride (LiPON) thin films were confirmed. LiPON thin films were deposited using a radio-frequency sputtering method, and post-annealing was performed in the temperature range of 100–400 °C. Compared with the initial as-depo state, the impedance decreased at temperatures of 100 and 200 °C, and it again increased at 300 and 400 °C. As a result, the lowest impedance was seen at 200 °C, and it increased significantly at 400 °C. To verify the cause of the electrochemical changes, the structural properties of the post-annealed LiPON thin films were confirmed using analytical methods, including X-ray diffraction (XRD), scanning electron microscope (SEM), and X-ray photoelectron spectroscopy (XPS). XRD and SEM analysis showed that the LiPON thin film prepared in this study had a typical amorphous structure and no change in crystal structure and morphology occurred at 400 °C. XPS analysis showed that the Li1s/P2p ratio had the greatest effect on the impedance change, according to the post-annealing temperature of LiPON thin films. The ionic conductivity evaluation of the five samples showed that 200 °C post-annealing was effective in increasing the ionic conductivity of LiPON thin films, and the effect was reproducible. © 2020 Elsevier Ltd and Techna Group S.r.l.
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