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Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering systemProperties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system

Alternative Title
Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system
Authors
최형욱
Issue Date
24-Jul-2009
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/33524
Place
일본
히로시마, 일본
metadata.conference.dc.citation.conferenceName
The 13th Japan-Korea International Syposium on Advanced Display Materials and Devices
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College of IT Convergence (Department of Electrical Engineering)
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