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대향타켓식 스퍼터링 방법을 이용한 IZTO 박막의 제작
- Authors
- 최명규
- Issue Date
- 15-Feb-2008
- Place
- South Korea
단국대학교 죽전 캠퍼스
- metadata.conference.dc.citation.conferenceName
- 한국진공학회 동계 정기학술대회 초록집
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