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SiON MOSFET의 전기적 계면 트랩에 대한 양자화학적 연구Quantum chemical study of electrically active interface traps in SiON MOSFETs

Alternative Title
Quantum chemical study of electrically active interface traps in SiON MOSFETs
Authors
이은철
Issue Date
4-Oct-2007
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36010
Place
South Korea
연세대학교
metadata.conference.dc.citation.conferenceName
한국전기화학회 추계학술대회
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바이오나노대학 > 나노물리학과 > 2. Conference Papers

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BioNano Technology (Department of Physics)
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