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RF 스퍼터링 법에 의한 ZnO 박막의 결정성과 기판의 냉각속도The crystalline characteristics of ZnO deposited on various cooling rates by RF sputter
- Alternative Title
- The crystalline characteristics of ZnO deposited on various cooling rates by RF sputter
- Authors
- 이능헌
- Issue Date
- 11-Nov-2006
- Place
- South Korea
전북대학교
- metadata.conference.dc.citation.conferenceName
- 2006년도 한국전기전자재료학회 추계학술대회
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