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RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition
- Alternative Title
- Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition
- Authors
- 이능헌
- Issue Date
- 28-Oct-2006
- Place
- South Korea
강원도 강촌리조트
- metadata.conference.dc.citation.conferenceName
- 2006년도 대한전기학회 전기물성·응용부문회 추계학술대회
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