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ZnO를 이용한 air-gap 형태의 FBAR 소자 제작에 대한 연구A study of air-gap type FBAR device fabrication using ZnO
- Alternative Title
- A study of air-gap type FBAR device fabrication using ZnO
- Authors
- 이능헌
- Issue Date
- 14-Jul-2006
- Place
- South Korea
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- metadata.conference.dc.citation.conferenceName
- 2006년도 대한전기학회 하계학술대회
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