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RF 마그네트론 스퍼터링에 의해 증착된 SMR 구조 FBAR 소자의 Bragg 반사층의 미세구조 특성에 관한 연구Micro-structural characteristics of Bragg reflector of SMR type FBAR device deposited by RF magnetron sputtering
- Alternative Title
- Micro-structural characteristics of Bragg reflector of SMR type FBAR device deposited by RF magnetron sputtering
- Authors
- 신영화
- Issue Date
- 20-Jul-2005
- Place
- South Korea
강원도 평창군 휘닉스파크
- metadata.conference.dc.citation.conferenceName
- 대한전기학회 제 36회 하계학술대회
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