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FBAR소자의 Bragg 반사층의 SiO2 박막 특성에 관한 연구Structure characteristics of SiO2 thin film of the FBAR Bragg reflector
- Alternative Title
- Structure characteristics of SiO2 thin film of the FBAR Bragg reflector
- Authors
- 이능헌
- Issue Date
- 9-Jul-2005
- Place
- South Korea
경주교육문화회관
- metadata.conference.dc.citation.conferenceName
- 한국전기전자재료학회 2005년도 하계학술대회
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