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Two-Step 스퍼터링 법에 의한 Co77Cr20Ta23 박막의 결정학 특성

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박용서
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https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37734
Conference Name
2002년도 추계학술대회 논문집
Place
South Korea
metadata.conference.dc.citation.conferenceName
한국전기전자 재료학회
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