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Effect of Amorphous Si Underlayer to CoCrTa/Si Thin Film perpared by Facing Targets Sputtering System
- Authors
- 최동진
- Conference Name
- International Conference on Electrical Engineering 2002
- Place
- South Korea
- metadata.conference.dc.citation.conferenceName
- ICEE2002 전기공학 국제학술대회(The International Conference on Electical Engineering)
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