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대향타겟식 스퍼터법으로 제작된 AlN 박막의 결정학적 특성
- Authors
- 최형욱
- Conference Name
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
- Place
- South Korea
- metadata.conference.dc.citation.conferenceName
- 한국전기전자재료학회
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Collections - IT융합대학 > 전기공학과 > 2. Conference Papers
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Related Researcher
- Choi, Hyung Wook
- College of IT Convergence (Department of Electrical Engineering)