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대향타겟식 스퍼터링법으로 제작된 ZnO박막의 C축 배향성

Authors
최동진
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39225
Conference Name
춘계 전기전자재료학술대회 논문집
Place
South Korea
metadata.conference.dc.citation.conferenceName
한국전기전자재료학회
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