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플라즈마 구속식 대향타겟 스퍼터 장치의 제작

Authors
김경환
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https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39429
Conference Name
추계학술대회논문집
Place
대한민국
metadata.conference.dc.citation.conferenceName
대한전기학회
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IT융합대학 > 전기공학과 > 2. Conference Papers

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College of IT Convergence (Department of Electrical Engineering)
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