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유리 기판 위에 제작된 Nitrocellulose/MWCNT 박막의 질소가스 검출특성
이원재
;
장경욱
; 최명규
Article
Issue Date
2012
Citation
반도체디스플레이기술학회지, v.11, no.1, pp.55 - 59
Publisher
한국반도체디스플레이기술학회
Effect of substrate temperature on the properties of AZO thin film deposited by using facing targets sputtering system
정유섭;
김경환
; 최명규
Article
Issue Date
2012
Citation
반도체디스플레이기술학회지, v.11, no.1, pp.1 - 5
Publisher
한국반도체디스플레이기술학회
1
Discover
Author
Kim, Kyung Hwan
1
Jang, Kyung Uk
1
Lee, Won Jae
1
정유섭
1
Subject
Arrhenius plot
1
AZO
1
Facing targets sputtering
1
Nitrocellulose/MWCNT
1
NOx gas sensor
1
Spray method
1
Substrate temperature
1
Date Issued
2012
2
Type
Article
2
Language
English
1
Korean
1
Journal
반도체디스플레이기술학회지
2
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