Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
- Authors
- Yoo, Hocheon; Park, Hongkeun; Yoo, Seunghyun; On, Sungmin; Seong, Hyejeong; Im, Sung Gap; Kim, Jae-Joon
- Issue Date
- Jun-2019
- Publisher
- NATURE PUBLISHING GROUP
- Citation
- NATURE COMMUNICATIONS, v.10
- Journal Title
- NATURE COMMUNICATIONS
- Volume
- 10
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/78565
- DOI
- 10.1038/s41467-019-10412-9
- ISSN
- 2041-1723
- Abstract
- Multilevel metal interconnects are crucial for the development of large-scale organic integrated circuits. In particular, three-dimensional integrated circuits require a large number of vertical interconnects between layers. Here, we present a novel multilevel metal interconnect scheme that involves solvent-free patterning of insulator layers to form an interconnecting area that ensures a reliable electrical connection between two metals in different layers. Using a highly reliable interconnect method, the highest stacked organic transistors to date, a three-dimensional organic integrated circuits consisting of 5 transistors and 20 metal layers, is successfully fabricated in a solvent-free manner. All transistors exhibit outstanding device characteristics, including a high on/off current ratio of similar to 10(7), no hysteresis behavior, and excellent device-to-device uniformity. We also demonstrate two vertically-stacked complementary inverter circuits that use transistors on 4 different floors. All circuits show superb inverter characteristics with a 100% output voltage swing and gain up to 35 V per V.
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