Effect of Annealing in ITO Film Prepared at Various Argon-and-Oxygen-Mixture Ratios via Facing-Target Sputtering for Transparent Electrode of Perovskite Solar Cells
- Authors
- Kim, Yujin; Joo, Sung Hwan; Shin, Seong Gwan; Choi, Hyung Wook; Bark, Chung Wung; Rim, You Seung; Kim, Kyung Hwan; Kim, Sangmo
- Issue Date
- Feb-2022
- Publisher
- MDPI
- Keywords
- Oxygen gas; PSCs; Sputtering deposition; Transparent electrode
- Citation
- Coatings, v.12, no.2
- Journal Title
- Coatings
- Volume
- 12
- Number
- 2
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/84033
- DOI
- 10.3390/coatings12020203
- ISSN
- 2079-6412
- Abstract
- Normal perovskite solar cells (PSCs) consist of the following layers: transparent electrode, electron-transport layer (ETL), light-absorbing perovskite layer, hole-transport layer (HTL), and metal electrode. Energy, such as electricity, is produced through light absorbance and electron–hole generation/transport between two electrode types (metal film and transparent conducting film). Among stacked layers in a PSC, the transparent electrode plays the high-performance-power-con-version-efficiency role. Transparent electrodes should have high-visible-range transparency and low resistance. Therefore, in this study, we prepared indium tin oxide (ITO) films on a glass substrate by using facing-target sputtering without substrate heating treatment and investigate the heating-treatment effect on the ITO-film properties for perovskite solar cells (PSCs). Moreover, we fabricated PSCs with ITO films prepared at various oxygen flows during the sputtering process, and their energy-conversion properties are investigated. © 2022 by the authors. Licensee MDPI, Basel, Switzerland.
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