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Step-like current-voltage thin-film transistors with amorphous SiZnSnO/ SiInZnO/SiZnSnO multilayered-channels

Authors
Murugan, BalajiLee, Sang Yeol
Issue Date
Dec-2022
Publisher
ELSEVIER
Keywords
Multilayer; TFTs; Current -voltage; Thickness; Si concentration; SZTO; SIZO; SZTO channel
Citation
INORGANIC CHEMISTRY COMMUNICATIONS, v.146
Journal Title
INORGANIC CHEMISTRY COMMUNICATIONS
Volume
146
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/86471
DOI
10.1016/j.inoche.2022.110094
ISSN
1387-7003
Abstract
Multi-valued logic (MVL) is a critical approach for high-density information and next-generation digital elec-tronics. Recently developed multilayered-channel structure electronic devices provide new transistor operation of multi-valued logic switching characteristics. This paper investigates the step-like transfer curves of the amorphous SiZnSnO/SiInZnO/SiZnSnO (a-SZTO/SIZO/SZTO or a-SSS) multilayered-channel thin-film transistors (TFTs). The step-like transfer curves of a-SSS TFTs can be tuned intentionally by varying the thickness of the top and bottom layers of a-SZTO mainly because a low conducting material is introduced as a barrier layer to separate the top and bottom layers to obtain the intermediate states. Additionally, the conducting nature of the middle/barrier layer of a-SIZO was varied and studied for different Si concentrations.
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반도체대학 (반도체·전자공학부)
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