Detailed Information

Cited 2 time in webofscience Cited 2 time in scopus
Metadata Downloads

Electrical instabilities in amorphous Si-Zn-sn-O thin film transistors under ultra-violet irradiation depending on oxygen content

Authors
Murugan, BalajiLee, Sang Yeol
Issue Date
Feb-2023
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Keywords
Oxygen flow; O2 vacancies; UV irradiation; Threshold voltage; current ON; OFF; a-SZTO TFTs
Citation
SOLID-STATE ELECTRONICS, v.200
Journal Title
SOLID-STATE ELECTRONICS
Volume
200
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/86759
DOI
10.1016/j.sse.2022.108539
ISSN
0038-1101
Abstract
The effect of different oxygen (O2) flow rates during the radio-frequency (RF) sputter deposition of amorphous silicon-zinc-tin-oxide (a-SZTO) thin film transistors (TFTs) has been studied. The threshold voltage (Vth) shifts towards the positive bias by increasing the O2 flow rate during the deposition, which decreases the electron concentration by reducing oxygen vacancies (VOs). The post-treatment of the devices under ultraviolet (UV) irradiation in the air atmosphere has been performed to analyze the reliability of light. The post-treatment of UV irradiation on the a-SZTO TFT for different time intervals significantly shifts the threshold voltage (Vth) from enhance-to depletion mode owing to the creation of VOs. Interestingly, we observed that UV irradiation is more effective on the parameters of Vth and the current ON/OFF (ION/OFF) ratio for the TFTs prepared at lower O2 flow rates. The reason may be that by introducing more oxygen flow, the de-trapping of electrons is reduced under UV irradiation due to the reduced VOs. UV irradiation does not significantly impact the field-effect mobility (mu FE) for different O2 flow rates. The negative bias stress measurement of the devices was performed and analyzed for different O2 flow rates under UV irradiation treatment.
Files in This Item
There are no files associated with this item.
Appears in
Collections
IT융합대학 > 전자공학과 > 1. Journal Articles

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Lee, Sang Yeol photo

Lee, Sang Yeol
반도체대학 (반도체·전자공학부)
Read more

Altmetrics

Total Views & Downloads

BROWSE