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FTS로 증착된 AZO 박막의 두께에 따른 구조적, 전기적, 광학적 특성 변화Changes in Structural, Electrical, and Optical Properties Depending on the Thickness of AZO Thin Films Deposited with FTS
- Other Titles
- Changes in Structural, Electrical, and Optical Properties Depending on the Thickness of AZO Thin Films Deposited with FTS
- Issue Date
- Mar-2024
- Publisher
- 한국전기전자재료학회
- Keywords
- AZO; Sputtering; TCO
- Citation
- 전기전자재료학회논문지, v.37, no.2, pp 169 - 174
- Pages
- 6
- Journal Title
- 전기전자재료학회논문지
- Volume
- 37
- Number
- 2
- Start Page
- 169
- End Page
- 174
- ISSN
- 1226-7945
2288-3258
- Abstract
- In this study, the structural, electrical, and optical properties of AZO films of various thicknesses are compared. The AZO films were deposited on a glass substrate by FTS (Facing-Target-Sputtering) This research was conducted to find the optimal thickness for Transparent Conductive Oxide (TCO). AZO has suitable properties for TCO such as low resistivity, and high transmittance. Thin films of all thicknesses showed a transmittance of over 80% in the visible light region and electrical properties improved as thickness increased. It was confirmed that the film of 300 nm thick had the best performance due to its low resistivity, and uniform surface. This research is expected to help find optimal conditions in various fields where TCO is used, such as solar cells, displays, and sensors in the future.
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Related Researcher
- Hong, Jeong Soo
- College of IT Convergence (Department of Electrical Engineering)