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Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmasGo to Link

Oh, Se-Jin; Choi, Ik-Jin; Kim, Jin-Yong; Chung, Chin-Wook

ArticleIssue Date2012CitationMeasurement Science and Technology, v.23, no.8, pp 1 - 6PublisherInstitute of Physics and the Physical Society
SCISCIESCOPUS
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin FilmsGo to Link

Kim, Hyungchul; Woo, Sanghyun; Lee, Jaesang; Kim, Yongchan; Lee, Hyerin; Choi, Ik-Jin; Kim, Young-Do; Chung, Chin-Wook; Jeon, Hyeongtag

ArticleIssue Date2011CitationJournal of the Electrochemical Society, v.158, no.1, pp H21 - H24PublisherElectrochemical Society, Inc.
SCISCIESCOPUS
Measurement of electron temperature and ion density using the self-bias effect in plasmasGo to Link

Hwang, Kwang-Tae; Oh, Se-Jin; Choi, Ik-Jin; Chung, Chin-Wook

ArticleIssue Date2010CitationPhysics of Plasmas, v.17, no.6, pp 1 - 4PublisherAmerican Institute of Physics
SCISCIESCOPUS
Wireless wafer-type probe system for measurement of two-dimensional plasma parameters and spatial uniformityGo to Link

Kim, Jin-Yong; Oh, Se-Jin; Kim, Young-Cheol; Choi, Ik-Jin; Chung, Chin-Wook

ArticleIssue Date2013CitationMeasurement Science and Technology, v.24, no.9, pp 1 - 9PublisherInstitute of Physics and the Physical Society
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