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Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas

Authors
Oh, Se-JinChoi, Ik-JinKim, Jin-YongChung, Chin-Wook
Issue Date
Aug-2012
Publisher
IOP PUBLISHING LTD
Keywords
plasma; diagnostics; electrostatic probe; measurement; double probe
Citation
MEASUREMENT SCIENCE AND TECHNOLOGY, v.23, no.8, pp.1 - 6
Indexed
SCIE
SCOPUS
Journal Title
MEASUREMENT SCIENCE AND TECHNOLOGY
Volume
23
Number
8
Start Page
1
End Page
6
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/164983
DOI
10.1088/0957-0233/23/8/085001
ISSN
0957-0233
Abstract
A double probe diagnostic using an ac bias signal between both probe tips was developed. The electron temperature and electropositive ion flux were derived by analyzing the first and third harmonic currents of the probe. The double probe was compared with the floating-type single probe at various RF powers and pressures in an inductively coupled plasma. The electron temperature and electropositive ion flux measured from the double probe agreed with the measurements from the floating-type single probe. This methodology can be applied to an electrically isolated diagnostic system for processing plasmas.
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