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Effect of helium on spatial plasma parameters in low pressure argon-helium plasmaGo to Link

Bang, Jin-Young; Han, Duksun; Cho, Sung-Won; Chung, Chin-Wook

ArticleIssue Date2012CitationApplied Physics Letters, v.100, no.16, pp 1 - 5PublisherAmerican Institute of Physics
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Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasmaGo to Link

Han, Duksun; Lee, Hyo-Chang; Kim, Hea-Jee; Kim, Yu Sin; Chung, Chin-Wook; Chae, Heesun

ArticleIssue Date2013CitationPlasma Sources Science and Technology, v.22, no.5, pp 1 - 6PublisherInstitute of Physics Publishing
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Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmasGo to Link

Han, Duksun; Lee, Hyo-Chang; Bang, Jin-Young; Chung, Chin-Wook; Moon, Se Youn

ArticleIssue Date2015CitationCurrent Applied Physics, v.15, no.9, pp 1036 - 1041PublisherThe Korean Physical Society
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