Effect of helium on spatial plasma parameters in low pressure argon-helium plasma
- Authors
- Bang, Jin-Young; Han, Duksun; Cho, Sung-Won; Chung, Chin-Wook
- Issue Date
- Apr-2012
- Publisher
- AMER INST PHYSICS
- Keywords
- argon; helium; Langmuir probes; plasma collision processes; plasma density; plasma heating; plasma pressure; plasma transport processes; probability
- Citation
- APPLIED PHYSICS LETTERS, v.100, no.16, pp.1 - 5
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 100
- Number
- 16
- Start Page
- 1
- End Page
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165978
- DOI
- 10.1063/1.3703608
- ISSN
- 0003-6951
- Abstract
- Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region.
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