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SCIESCOPUS
Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order ModeGo to Linkopen access

Toan, Nguyen Van; Shimazaki, Tsuyoshi; Inomata, Naoki; Song, Yunheub; Ono, Takahito

ArticleIssue Date2017CitationMicromachines, v.8, no.10PublisherMultidisciplinary Digital Publishing Institute (MDPI)
SCIESCOPUS
Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor DepositionGo to Link

Nguyen Van Toon; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationPHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.216, no.14, pp.1 - 8PublisherWILEY-V C H VERLAG GMBH
SCOPUS
Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from MicroactuatorGo to Link

Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationInternational Solid-State Sensors, Actuators and Microsystems Conference, pp 1698 - 1700PublisherIEEE
SCOPUS
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor DepositionGo to Link

Toan, Nguyen Van; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationInternational Solid-State Sensors, Actuators and Microsystems Conference, pp 1709 - 1711PublisherIEEE
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