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SCIESCOPUS
Measurement of the electron energy distribution functions in low density RF plasmas through a tunable external RF filterGo to Link

Jeon, Sang-Bum; Park, Ji-Hwan; Chung, Chin-Wook

ArticleIssue Date2022CitationPLASMA SOURCES SCIENCE & TECHNOLOGY, v.31, no.4, pp.1 - 10PublisherIOP PUBLISHING LTD
SCISCIESCOPUS
Power dependence of electron density at various pressures in inductively coupled plasmasGo to Link

Kim, June Young; Kim, Dong-Hwan; Kim, Ju Ho; Jeon, Sang-Bum; Cho, Sung-Won; Chung, Chin-Wook

ArticleIssue Date2014CitationPhysics of Plasmas, v.21, no.11, pp 1 - 5PublisherAmerican Institute of Physics
SCIESCOPUS
Triple-frequency floating probe method for plasma parameters applicable to processing plasmasGo to Link

Seo, Beom-Jun; Lee, Ho-Won; Jeon, Sang-Bum; Nahm, Hyeon-Ho; Chung, Chin-Wook

ArticleIssue Date2025CitationPlasma Sources Science and Technology, v.34, no.5, pp 1 - 10PublisherInstitute of Physics Publishing
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