Jeon, Hongseok; Cho, Chan-Woo; Lim, Chun Hsiung; Park, Bonghyun; Ju, Heongkyu; Kim, Sangsig; Lee, Seung-Beck
ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 3192 - 3195PublisherAmerican Institute of Physics