Kim, Do-Yoon; Lee, Hag Joo; Jung, Ho Young; Lee, Nae Eung; Kim, Tae Geun; Kim, Byung-Hun; Ahn, Jinho; Kim, Chung Ywong
ArticleIssue Date2008CitationJournal of Vacuum Science and Technology A, v.26, no.4, pp 857 - 860PublisherAmerican Institute of Physics