Hwang, Su Min; Kim, Harrison Sejoon; Le, Dan N.; Sahota, Akshay; Lee, Jaebeom; Jung, Yong Chan; Kim, Sang Woo; Kim, Si Joon; Choi, Rino; Ahn, Jinho, et al.
ArticleIssue Date2022CitationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, v.40, no.2, pp.1 - 8PublisherAVS Science and Technology Society