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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Experimental investigation of edge-to-center density ratio in inductively coupled plasmasGo to Link

Kim, Gun-Ho; Lee, Hyo-Chang; Chung, Chin-Wook

ArticleIssue Date2010CitationPhysics of Plasmas, v.17, no.7, pp 1 - 4PublisherAmerican Institute of Physics
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Harmonic analysis of sideband signals generated in plasmasGo to Link

Jang, Sung-Ho; Kim, Gun-Ho; Chung, Chin-Wook

ArticleIssue Date2011CitationThin Solid Films, v.519, no.20, pp 7042 - 7044PublisherElsevier Sequoia
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In situ method for real time measurement of dielectric film thickness in plasmasGo to Link

Jang, Sung-Ho; Kim, Gun-Ho; Chung, Chin-Wook

ArticleIssue Date2010CitationJournal of Applied Physics, v.107, no.2, pp 1 - 5PublisherAmerican Institute of Physics
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