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Experimental investigation of edge-to-center density ratio in inductively coupled plasmas
- Authors
- Kim, Gun-Ho; Lee, Hyo-Chang; Chung, Chin-Wook
- Issue Date
- Jul-2010
- Publisher
- American Institute of Physics
- Citation
- Physics of Plasmas, v.17, no.7, pp 1 - 4
- Pages
- 4
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- Physics of Plasmas
- Volume
- 17
- Number
- 7
- Start Page
- 1
- End Page
- 4
- ISSN
- 1070-664X
1089-7674
- Abstract
- Edge-to-center density ratios were measured by using a floating harmonics method in inductively coupled plasma (ICP) and were compared to the theoretical model. As the gas pressure increased, the plasma density at the center increased. However, plasma density at the edge showed a different trend; it had a maximum value at 10 mTorr with increasing gas pressures, regardless of ICP powers. This unexpected result could be explained by a global power balance equation.
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)