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SCIESCOPUS
High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursorGo to Link

Kim, Harrison Sejoon; Hwang, Su Min; Meng, Xin; Byun, Young-Chul; Jung, Yong Chan; Ravichandran, Arul Vigneswar; Sahota, Akshay; Kim, Si Joon; Ahn, Jinho; Lee, Lance, et al.

ArticleIssue Date2020CitationJOURNAL OF MATERIALS CHEMISTRY C, v.8, no.37, pp.13033 - 13039PublisherROYAL SOC CHEMISTRY
SCIESCOPUS
Highly Reliable Selection Behavior with Controlled Ag Doping of Nano-polycrystalline ZnO Layer for 3D X-Point Framework

Sahota, Akshay; Kim, Harrison Sejoon; Mohan, Jaidah; Jung, Yong Chan; Hernandez-Arriaga, Heber; Le, Dan N.; Kim,Si Joon; Lee, Jang-Sik; Ahn, Jinho; Kim, Jiyoung

ArticleIssue Date2022CitationIEEE Electron Device Letters, v.43, no.1, pp.21 - 24PublisherInstitute of Electrical and Electronics Engineers Inc.
SCIESCOPUS
Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen SourceGo to Linkopen access

Jung, Yong Chan; Hwang, Su Min; Le, Dan N.; Kondusamy, Aswin L. N.; Mohan, Jaidah; Kim, Sang Woo; Kim, Jin Hyun; Lucero, Antonio T.; Ravichandran, Arul; Kim, Harrison Sejoon, et al.

ArticleIssue Date2020CitationMATERIALS, v.13, no.15, pp.1 - 10PublisherMDPI
SCIESCOPUS
Nano-polycrystalline Ag-doped ZnO layer for steep-slope threshold switching selectorsGo to Linkopen access

Sahota, Akshay; Kim, Harrison Sejoon; Mohan, Jaidah; Le, Dan N.; Jung, Yong Chan; Kim, Si Joon; Lee, Jang-Sik; Ahn, Jinho; Hernandez-Arriaga, Heber; Kim, Jiyoung

ArticleIssue Date2021CitationAIP ADVANCES, v.11, no.11, pp.1 - 7PublisherAMER INST PHYSICS
SCIESCOPUS
Ozone based high-temperature atomic layer deposition of SiO2 thin filmsGo to Link

Hwang, Su Min; Qin, Zhiyang; Kim, Harrison Sejoon; Ravichandran, Arul; Jung, Yong Chan; Kim, Si Joon; Ahn, Jinho; Hwang, Byung Keun; Kim, Jiyoung

ArticleIssue Date2020CitationJapanese Journal of Applied Physics, v.59, pp 1 - 5PublisherIOP Publishing Ltd
SCIESCOPUS
Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc OxideGo to Link

Kim, Harrison Sejoon; Lee, Joy S.; Kim, Si Joon; Lee, Jaebeom; Lucero, Antonio T.; Sung, Myung Mo; Kim, Jiyoung

ArticleIssue Date2019CitationACS COMBINATORIAL SCIENCE, v.21, no.6, pp.445 - 455PublisherAMER CHEMICAL SOC
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