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Amorphous IGZO TFT with High Mobility of similar to 70 cm²/(V s) via Vertical Dimension Control Using PEALDGo to Link

Sheng, Jiazhen; Hong, TaeHyun; Lee, Hyun-Mo; Kim, KyoungRok; Sasase, Masato; Kim, Junghwan; Hosono, Hideo; Park, Jin-Seong

ArticleIssue Date2019CitationACS APPLIED MATERIALS & INTERFACES, v.11, no.43, pp.40300 - 40309PublisherAMER CHEMICAL SOC
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Hydrogen Impacts of PEALD InGaZnO TFTs Using SiOx Gate Insulators Deposited by PECVD and PEALDGo to Link

Jeong, Seok-Goo; Jeong, Hyun-Jun; Choi, Wan-Ho; Kim, KyoungRok; Park, Jin-Seong

ArticleIssue Date2020CitationIEEE Transactions on Electron Devices, v.67, no.10, pp 4250 - 4255PublisherInstitute of Electrical and Electronics Engineers
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