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Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturingGo to Linkopen access

Yang, Hae Lin; Kim, Min Chan; Park, Gi-Beom; Park, Ji-Yeon; Park, Hyein; Shin, Jihoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2026CitationINTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, v.8, no.4, pp 1 - 11PublisherIOP Publishing Ltd
SCIESCOPUS
Crystallinity-Preserving Atomic Layer Etching of Ultrathin In2O3 for Stable Oxide NanoelectronicsGo to Link

Kim, Min Chan; Yang, Hae Lin; Gwoen, Ji Hyun; Shin, Seong-A.; Kim, Min-Seo; Park, Jin-Seong

ArticleIssue Date2025CitationACS Nano, v.19, no.45, pp 39362 - 39370PublisherAMER CHEMICAL SOC
SCIESCOPUS
Unlocking the synergy of ALD and ALE: tailoring crystallinity and etch rates in ZnO thin films at the atomic scaleGo to Link

Gwoen, Ji Hyun; Yang, Hae Lin; Kim, Min Chan; Jeong, Gyeong Min; Kim, Tae Kyung; Visser, Cas; Kessels, Wilhelmus M.M. (Erwin); Park, Jin-Seong

ArticleIssue Date2026CitationApplied Surface Science, v.717, pp 1 - 10PublisherElsevier BV
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