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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Discharge dynamics and plasma density recovery by on/off switches of additional gasGo to Link

Lee, Hyo-Chang; Kwon, Deuk-Chul; Oh, SeungJu; Kang, Hyun-Ju; Kim, Yu-Sin; Chung, Chin-Wook

ArticleIssue Date2016CitationPhysics of Plasmas, v.23, no.6, pp 1 - 5PublisherAmerican Institute of Physics
SCISCIESCOPUS
Evolution of electron temperature in inductively coupled plasmaGo to Link

Lee, Hyo-Chang; Seo, B. H.; Kwon, Deuk-Chul; Kim, J. H.; Seong, D. J.; Oh, S. J.; Chung, Chin Wook; You, K. H.; Shin, ChaeHo

ArticleIssue Date2017CitationApplied Physics Letters, v.110, no.1, pp 1 - 5PublisherAmerican Institute of Physics
SCISCIESCOPUS
Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasmaGo to Link

Gu, Seuli; Kang, Hyun-Ju; Kwon, Deuk-Chul; Kim, Yu-Sin; Chang, Yoon-Min; Chung, Chin-Wook

ArticleIssue Date2016CitationPhysics of Plasmas, v.23, no.6, pp 1 - 5PublisherAmerican Institute of Physics
SCIESCOPUS
The opposite pressure dependence of electron temperature with respect to O-2/Ar mixing ratio in an inductively coupled plasmaGo to Link

Lee, Moo-Young; Jung, Jiwon; Kim, Tae-Woo; Kim, Kyung-Hyun; Kwon, Deuk-Chul; Chung, Chin-Wook

ArticleIssue Date2020CitationPHYSICS OF PLASMAS, v.27, no.11, pp.1 - 9PublisherAMER INST PHYSICS
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