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Atomic layer deposition of HfO2 thin films on ultrathin SiO2 formed by remote plasma oxidation Go to Link

Kim, Seokhoon; Woo, Sanghyun; Kim, Hyungchul; Kim, Inhoe; Lee, Keunwoo; Jeong, Wooho; Park, Taeyong; Jeon, Hyeongtag

ArticleIssue Date2008CitationJournal of the Korean Physical Society, v.52, no.4, pp 1103 - 1108Publisher한국물리학회

SCIESCOPUS

Barrier characteristics of ZrN films deposited by remote plasma-enhanced atomic layer deposition using tetrakis(diethylamino)zirconium precursor Go to Link

Cho, Seungchan; Lee, Keunwoo; Song, Pungkeun; Jeon, Hyeongtag; Kim, Yangdo

ArticleIssue Date2007CitationJapanese Journal of Applied Physics, v.46, no.7A, pp 4085 - 4088PublisherIOP Publishing Ltd

SCIESCOPUS

Characteristics of cobalt films deposited by metal organic chemical vapor deposition method using dicobalt hexacarbonyl tert-butylacetylene Go to Link

Lee, Keunwoo; Park, Taeyong; Lee, Jaesang; Kim, Jinwoo; Kim, Jeongtae; Kwak, Nohjung; Yeom, Seungjin; Jeon, Hyeongtag

ArticleIssue Date2008CitationJapanese Journal of Applied Physics, v.47, no.7, pp 5396 - 5399PublisherIOP Publishing Ltd

SCIESCOPUSKCI

Characteristics of cobalt films deposited by using a remote plasma ALD method with a CpCo(CO)(2) precursor Go to Link

Lee, Keunwoo; Kim, Keunjun; Jeon, Hyeongtag; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin

ArticleIssue Date2007CitationJournal of the Korean Physical Society, v.50, no.4, pp 1141 - 1146Publisher한국물리학회

SCIESCOPUS

Characteristics of cobalt thin films deposited by remote plasma ALD method with dicobalt octacarbonyl Go to Link

Kim, Keunjun; Lee, Keunwoo; Han, Sejin; Jeong, Wooho; Jeon, Hyeongtag

ArticleIssue Date2007CitationJournal of the Electrochemical Society, v.154, no.3, pp H177 - H181PublisherElectrochemical Society, Inc.

SCIESCOPUS

Characteristics of Ti-capped Co films deposited by a remote plasma ALD method using cyclopentadienylcobalt dicarbonyl Go to Link

Lee, Keunwoo; Kim, Keunjun; Park, Taeyong; Jeon, Hyeongtag; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin

ArticleIssue Date2007CitationJournal of the Electrochemical Society, v.154, no.10, pp H899 - H903PublisherElectrochemical Society, Inc.

SCOPUS

Cobalt thin film deposited by remote plasma atomic layer deposition method using Cl2H10O6(CO)2 and CpCo(CO)2 Go to Link

Lee, Keunwoo; Kim, Keunjun; Jeong, Wooho; Park, Taeyong; Jeon, Hyeongtag

ArticleIssue Date2007CitationSolid State Phenomena, v.124-126, no.PART 1, pp 359 - 362PublisherScitec Publications Ltd.

SCIESCOPUS

Comparison of co films deposited by remote plasma atomic layer deposition method with cyclopentadienylcobalt dicarbonyl [CpCo(CO)(2)] and dicobalt octacarbonyl [Co-2(CO)(8)]Go to Link

Kim, Keunjun; Lee, Keunwoo; Han, Sejin; Park, Taeyong; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin; Jeon, Hyeongtag

ArticleIssue Date2007CitationJapanese Journal of Applied Physics, v.46, no.8-11, pp L173 - L176PublisherIOP Publishing Ltd

SCIESCOPUS

Effects of Strained Silicon Layer on Nickel (Germano)silicide for Nanoscale Complementary Metal Oxide Semiconductor Field-Effect Transistor Device Go to Link

Kim, Ji-Young; Kim, Cho-Rong; Lee, Jaeyeop; Park, Won-Wook; Leem, Jae-Young; Ryu, Hyukhyun; Lee, Won-Jae; Zhang, Ying-Ying; Jung, Soon-Yen; Lee, Hi-Deok, et al.

ArticleIssue Date2008CitationJapanese Journal of Applied Physics, v.47, no.10, pp 7771 - 7774PublisherIOP Publishing Ltd

SCIESCOPUS

Epitaxial CoSi2 formation using an oxynitride buffer layer Go to Link

Lee, Jaesang; Lee, Keunwoo; Kim, Dongock; Park, Taeyong; Kim, Honggyu; Jeon, Hyeongtag

ArticleIssue Date2009CitationJournal of Materials Research, v.24, no.8, pp 2705 - 2710PublisherMaterials Research Society

SCIESCOPUS

Formation of an Epitaxial CoSi2 Layer with Reduced Oxygen Contamination Go to Link

Lee, Jaesang; Lee, Keunwoo; Park, Taeyong; Kim, Dongock; Jeon, Hyeongtag

ArticleIssue Date2009CitationJournal of the Electrochemical Society, v.156, no.5, pp H352 - H355PublisherElectrochemical Society, Inc.

SCIESCOPUS

Study of Nickel Silicide Thermal Stability Using Silicon-on-Insulator Substrate for Nanoscale Complementary Metal Oxide Semiconductor Field-Effect Transisor Device Go to Link

Kim, Ji-Young; Kim, Cho-Rong; Lee, Jaeyeop; Park, Won-Wook; Leem, Jae-Young; Ryu, Hyukhyun; Lee, Won-Jae; Zhang, Ying-Ying; Jung, Soon-Yen; Lee, Hi-Deok, et al.

ArticleIssue Date2008CitationJapanese Journal of Applied Physics, v.47, no.10, pp 7775 - 7779PublisherIOP Publishing Ltd

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Browsing by Lee, KeunwooAuthor

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