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SCIESCOPUS
Crystalline Phase-Dependent Emissivity of MoSi2 Nanomembranes for Extreme Ultraviolet Pellicle ApplicationsGo to Linkopen access

Kim, Haneul; Kang, Young Woo; Kim, Jungyeon; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationNanomaterials, v.15, no.19, pp 1 - 10PublisherMDPI
SCIESCOPUS
Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi2 Membranes for Extreme Ultraviolet PelliclesGo to Linkopen access

Kim, Won Jin; Wi, Seong Ju; Moon, Seungchan; Hong, Junho; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2026CitationCRYSTALS, v.16, no.2, pp 1 - 10PublisherMDPI
SCIESCOPUSKCI
Electrical and reliability characteristics of HfO2 MOS capacitor with Mo metal gate electrode

Park, In-Sung; Lee, Taeho; Ko, Hankyong; Ahn, Jinho

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, pp S760 - S763Publisher한국물리학회
SCIESCOPUS
Electrical properties of atomic layer deposited HfO2 gate dielectric film using D2O as oxidant for improved reliabilityGo to Link

Lee, Taeho; Ko, Han-Kyoung; Ahn, Jinho; Park, In-Sung; Sim, Hyunjun; Park, Hokyung; Hwang, Hyunsang

ArticleIssue Date2006CitationJapanese Journal of Applied Physics, v.45, no.9A, pp 6993 - 6995PublisherIOP Publishing Ltd
SCIESCOPUS
Electricity Production by the Application of a Low Voltage DC-DC Boost Converter to a Continuously Operating Flat-Plate Microbial Fuel CellGo to Linkopen access

Song, Young Eun; Boghani, Hitesh C.; Kim, Hong Suck; Kim, Byung Goon; Lee, Taeho; Jeon, Byong Hun; Premier, Giuliano C.; Kim, Jung Rae

ArticleIssue Date2017CitationEnergies, v.10, no.5, pp 1 - 16PublisherMultidisciplinary Digital Publishing Institute (MDPI)
SCIESCOPUS
Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical BehaviorGo to Linkopen access

Kim, Haneul; Kim, Jungyeon; Kang, Young Woo; Lee, Taeho; Kim, Min-Woo; Ha, Tae Joong; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2025CitationMATERIALS, v.19, no.1, pp 1 - 14PublisherMDPI
SCIESCOPUS
Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern TypesGo to Linkopen access

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Lee, Taeho; Ekinci, Yasin; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.3, pp 1 - 13PublisherMDPI AG
SCIESCOPUS
Improving etchability and imaging performance of EUV mask absorber materials via ion implantationGo to Link

Kim, Yunsoo; Jeong, Dongmin; Lee, Seungho; Kim, Bom-Sok; Kim, Myung-Jin; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2026CitationApplied Physics A: Materials Science and Processing, v.132, no.4, pp 1 - 8PublisherSpringer Science and Business Media Deutschland GmbH
SCIESCOPUS
Improving etchability and imaging performance of EUV mask absorber materials via ion implantation (Vol 132, 245, 2026)Go to Link

Kim, Yunsoo; Jeong, Dongmin; Lee, Seungho; Kim, Bom-Sok; Kim, Myung-Jin; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2026CitationAPPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.132, no.5, pp 1 - 1PublisherSPRINGER HEIDELBERG
SCOPUS
Improving Etchability of Challenging Materials through the Ion Implantation Process

Kim, Yunsoo; Jeong, Dongmin; Lee, Seungho; Kim, Myung-Jin; Kim, Bom-Sok; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 6PublisherSPIE
SCIESCOPUS
Inverse design of color routers in CMOS image sensors: toward minimizing interpixel crosstalkGo to Linkopen access

Lee, Sangbin; Hong, Jaehyun; Kang, Joonho; Park, Junjeong; Lim, Jaesung; Lee, Taeho; Jang, Min Seok; Chung, Haejun

ArticleIssue Date2024CitationNANOPHOTONICS, v.13, no.20, pp 3895 - 3914PublisherWALTER DE GRUYTER GMBH
SCIESCOPUS
Layer-by-layer photonic crystal fabricated by low-temperature atomic layer depositionGo to Link

Lee, Jae-Hwang; Leung, Wai; Ahn, Jinho; Lee, Taeho; Park, In-Sung; Constant, Kristen; Ho, Kai-Ming

ArticleIssue Date2007CitationApplied Physics Letters, v.90, no.15, pp 1 - 4PublisherAmerican Institute of Physics
SCIESCOPUS
Maximum Power Point Tracking to Increase the Power Production and Treatment Efficiency of a Continuously Operated Flat-Plate Microbial Fuel CellGo to Link

Song, Young Eun; Boghani, Hitesh C.; Kim, Hong Suck; Kim, Byung Goon; Lee, Taeho; Jeon, Byong Hun; Premier, Giuliano C.; Kim, Jung Rae

ArticleIssue Date2016CitationEnergy Technology, v.4, no.11, pp 1427 - 1434PublisherWiley - VCH Verlag GmbH & CO. KGaA
SCIESCOPUSKCI
Metal precursor effects on deposition and interfacial characteristics of HfO2 dielectrics grown by atomic layer deposition

Park, In-Sung; Lee, Taeho; Choi, Duck-Kyun; Ahn, Jinho

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, pp S544 - S547Publisher한국물리학회
SCOPUS
Multilayered EUV Pellicle: Enhanced Mechanical Strength and Thermal Stability

Kang, Young Woo; Kim, Ha Neul; Lee, Taeho; Park, Young Wook; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.13215, pp 1 - 5PublisherSPIE
SCIESCOPUS
Pt-W alloy absorbers for high-NA EUV lithography: tunable optical and etching performanceGo to Link

Kim, Yunsoo; Jeong, Dongmin; Lee, Seungho; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationNanotechnology, v.36, no.35, pp 1 - 7PublisherInstitute of Physics Publishing
SCIESCOPUS
Resolution Enhancement in Extreme Ultraviolet Ptychography Using a Refined Illumination Probe and Small-Etendue SourceGo to Linkopen access

Moon, Seungchan; Hong, Junho; Lee, Taeho; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.8, pp 1 - 12PublisherMDPI AG
SCIESCOPUS
Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pelliclesGo to Link

Kang, Young Woo; Kim, Haneul; Lee, Inseo; Lee, Taeho; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2026CitationApplied Surface Science, v.738, pp 1 - 7PublisherElsevier B.V.
SCIESCOPUS
Towards subwavelength pixels: nanophotonic color routers for ultra-compact high-efficiency CMOS image sensorsGo to Link

Park, Chanhyung; Lee, Sangbin; Lee, Taeho; Kang, Jiwon; Jeon, Jaehyun; Park, Chaejin; Kim, Sanmun; Chung, Haejun; Jang, Min Seok

ArticleIssue Date2024CitationJournal of Optics, v.26, no.9, pp 1 - 17PublisherInstitute of Physics Publishing
SCIESCOPUS
Vapor-Phase Dry Development of a Nanoscale Zn-Based Metal-Organic Extreme Ultraviolet Photoresist via Surface-Limited β-Diketone Chelation for High-Resolution PatterningGo to Link

Seok, Ji-Hoo; Kim, Jiwon; Ji, Hyeonseok; Lee, Jaehyuk; Lee, Taeho; Yoon, Kwang-Sub; Sung, Myung Mo; Ahn, Jinho

ArticleIssue Date2026CitationACS APPLIED NANO MATERIALS, v.9, no.12, pp 5506 - 5515PublisherAMER CHEMICAL SOC
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