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Effect of aluminum content on plasma resistance and contamination particle generation in yttrium aluminum oxide coatings Go to Link

So, Jongho; Choi, Eunmi; Kim, Minjoong; Lee, Dongjin; Seo, Jungpil; Maeng, Seonjeong; Chung, Chin-Wook; Yun, Ju-Young; Suh, Song-Moon

ArticleIssue Date2024CitationMaterials Science in Semiconductor Processing, v.170, pp 1 - 7PublisherPergamon Press

SCIESCOPUS

Effect of controlling residual moisture in atmospheric plasma spray-Y2O3 coatings on random defect generation by halogen-based plasma Go to Link open access

So, Jongho; Choi, Eunmi; Kim, Minjoong; Lee, Dongjin; Seo, Jungpil; Maeng, Seonjeong; Chung, Chin-Wook; Yun, Ju-Young; Suh, Song-Moon

ArticleIssue Date2025CitationJOURNAL OF THE EUROPEAN CERAMIC SOCIETY, v.45, no.2, pp 1 - 7PublisherELSEVIER SCI LTD

SCIESCOPUS

Investigation of the interactions of NF3-based plasma with Y2O3 and YF3 coatings: Focus on contamination particle generation and wall redeposition Go to Link

So, Jongho; Jeong, Inseok; Maeng, Seonjeong; Choi, Eunmi; Kim, Minjoong; Chung, Chin-Wook; Yun, Ju-Young

ArticleIssue Date2026CitationJournal of the European Ceramic Society, v.46, no.4, pp 1 - 11PublisherElsevier BV

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Browsing by Maeng, SeonjeongAuthor

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