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Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplatingGo to Link

Park, Jae-Hyung; Moon, Dae-Yong; Han, Dong-Suk; Kang, Yu-Jin; Shin, So-Ra; Jeon, Hyung-Tag; Park, Jong-Wan

ArticleIssue Date2014CitationSurface and Coatings Technology, v.259, pp 98 - 101PublisherElsevier BV
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Titanium Oxide Thin Films Prepared by Plasma Enhanced Atomic Layer Deposition Using Remote Electron Cyclotron Resonance Plasma for Organic Devices PassivationGo to Link

Kang, Byung-Woo; Kim, Woong-Sun; Hwang, Chang-Mook; Moon, Dae-Yong; Kim, Jay-Jung; Park, Jae-Gun; Park, Jong-Wan

ArticleIssue Date2010CitationJapanese Journal of Applied Physics, v.49, no.8, pp 1 - 3PublisherIOP Publishing Ltd
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