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Browsing by Park, Gi-BeomAuthor

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SCIESCOPUS
Advanced indicone Nanostructuring: Surface engineering with small molecule inhibitors through molecular layer depositionGo to Link

Yang, Hae Lin; Park, Gi-Beom; Baek, Geonho; Park, Jinhong; Heo, Kwang; Park, Bo Keun; Lee, Jung-Hoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2025CitationApplied Surface Science, v.684, pp 1 - 9PublisherElsevier BV
SCIESCOPUS
Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturingGo to Linkopen access

Yang, Hae Lin; Kim, Min Chan; Park, Gi-Beom; Park, Ji-Yeon; Park, Hyein; Shin, Jihoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2026CitationINTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, v.8, no.4, pp 1 - 11PublisherIOP Publishing Ltd
SCIESCOPUS
Graphitization of tincone via molecular layer deposition: investigating sulfur's role and structural impactsGo to Link

Jung, Hyolim; Yang, Hae Lin; Park, Gi-Beom; Kim, Ji-Min; Park, Jin-Seong

ArticleIssue Date2025CitationDalton Transactions, v.54, no.17, pp 7095 - 7104PublisherRoyal Society of Chemistry
SCIESCOPUS
Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinolGo to Link

Park, Gi-Beom; Yang, Hae Lin; Kim, Ji Min; Jung, Hyolim; Baek, Geonho; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationNanotechnology, v.35, no.40, pp 1 - 10PublisherInstitute of Physics Publishing
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