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Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturingGo to Linkopen access

Yang, Hae Lin; Kim, Min Chan; Park, Gi-Beom; Park, Ji-Yeon; Park, Hyein; Shin, Jihoon; Ahn, Jinho; Park, Jin-Seong

ArticleIssue Date2026CitationINTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, v.8, no.4, pp 1 - 11PublisherIOP Publishing Ltd
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