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Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasmaGo to Link

Park, Il-seo; Kim, Dong-Hwan; Kim, Kyung-Hyun; Chung, Chin-Wook

ArticleIssue Date2017CitationPhysics of Plasmas, v.24, no.5PublisherAmerican Institute of Physics
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