Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
- Authors
- Park, Il-seo; Kim, Dong-Hwan; Kim, Kyung-Hyun; Chung, Chin-Wook
- Issue Date
- May-2017
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.24, no.5
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 24
- Number
- 5
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/152439
- DOI
- 10.1063/1.4982815
- ISSN
- 1070-664X
- Abstract
- The two-dimensional temporal behavior of plasma was investigated at the wafer-level when applied power was turned on/off, which is one cycle of the pulsed plasma. For the measurement of transient plasma, the floating harmonic method and a post-processing method were used to obtain the ion flux and the electron temperature with a 1 ms time resolution. The results show that the transient behaviors of plasma such as antenna power absorption are observed in pulsed inductively coupled plasma. Antenna-shaped ion flux is observed when the power is turned on, and the radial profiles of the ion flux are followed by a diffusion solution when the power is turned off. Furthermore, the electron temperature shows pulsed plasma characteristics. Published by AIP Publishing.
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