Lee, Jungwoo; Park, Jaehong; Sim, Kijo; Yi, Whikun
ArticleIssue Date2009CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.27, no.2, pp 626 - 630PublisherAmerican Institute of Physics
ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.2, pp 847 - 850PublisherAmerican Institute of Physics
ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.6, pp 1892 - 1895PublisherAmerican Institute of Physics