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Showing results 1 to 11 of 11

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Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer depositionGo to Link

Kim, Hwanwoo; Song, Hyoseok; Shin, Changhee; Kim, Kangsoo; Jang, Woochool; Kim, Hyunjung; Shin, Seokyoon; Jeon, Hyeongtag

ArticleIssue Date2017CitationJournal of Vacuum Science and Technology A, v.35, no.1PublisherAmerican Institute of Physics
SCISCIESCOPUSKCI
Endurance improvement due to rapid thermal annealing (RTA) of a TaO (x) thin film in an oxygen ambientGo to Link

Hong, Junghyup; Jang, Woochool; Song, Hyoseok; Kang, Chunho; Jeon, Hyeongtag; Jeon, Heeyoung; Park, Jingyu; Kim, Hyunjung; Kim, Honggi

ArticleIssue Date2015CitationJournal of the Korean Physical Society, v.66, no.5, pp 721 - 725Publisher한국물리학회
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Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)(2) and oxygen remote plasmaGo to Link

Kang, Chunho; Jeon, Heeyoung; Jang, Woochool; Song, Hyoseok; Kim, Honggi; Kim, Hyunjung; Jeon, Hyeongtag

ArticleIssue Date2015Citationphysica status solidi (a) - applications and materials science, v.212, no.3, pp 674 - 679PublisherWiley - V C H Verlag GmbbH & Co.
SCISCIESCOPUS
Nonlinear and complementary resistive switching behaviors of Au/Ti/TaOx/TiN devices dependent on Ti thicknessesGo to Link

Jeon, Heeyoung; Park, Jingyu; Kim, Hyunjung; Kim, Honggi; Jang, Woochool; Song, Hyoseok; Jeon, Hyeongtag

ArticleIssue Date2015CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.33, no.5, pp 1 - 6PublisherAmerican Institute of Physics
SCISCIESCOPUSKCI
Resistive switching behaviors of Cu/TaOx/TiN device with combined oxygen vacancy/copper conductive filamentsGo to Link

Jeon, Heeyoung; Park, Jingyu; Jang, Woochool; Kim, Hyunjung; Song, Hyoseok; Kim, Honggi; Seo, Hyungtak; Jeon, Hyeongtag

ArticleIssue Date2015CitationCurrent Applied Physics, v.15, no.9, pp 1005 - 1009PublisherThe Korean Physical Society
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Resistive switching of a TaOx/TaON double layer via ionic control of carrier tunnelingGo to Link

Jeon, Heeyoung; Park, Jingyu; Jang, Woochool; Kim, Hyunjung; Kang, Chunho; Song, Hyoseok; Seo, Hyungtak; Jeon, Hyeongtag

ArticleIssue Date2014CitationApplied Physics Letters, v.104, no.15, pp 1 - 6PublisherAmerican Institute of Physics
SCIESCOPUS
Stabilization of Ni conductive filaments using NH3 plasma treatment for electrochemical metallization memoryGo to Link

Park, Jingyu; Jeon, Heeyoung; Kim, Hyunjung; Jang, Woochool; Song, Hyoseok; Kim, Honggi; Lee, Kunyoung; Jeon, Hyeongtag

ArticleIssue Date2015CitationRSC Advances, v.5, no.84, pp 68900 - 68905PublisherRoyal Society of Chemistry
SCISCIESCOPUS
Stabilized resistive switching behaviors of a Pt/TaOx/TiN RRAM under different oxygen contentsGo to Link

Jeon, Heeyoung; Park, Jingyu; Jang, Woochool; Kim, Hyunjung; Kang, Chunho; Song, Hyoseok; Kim, Honggi; Seo, Hyungtak; Jeon, Hyeongtag

ArticleIssue Date2014Citationphysica status solidi (a) - applications and materials science, v.211, no.9, pp 2189 - 2194PublisherWiley - V C H Verlag GmbbH & Co.
SCISCIESCOPUS
Temperature dependence of silicon nitride deposited by remote plasma atomic layer depositionGo to Link

Jang, Woochool; Jeon, Heeyoung; Kang, Chunho; Song, Hyoseok; Park, Jingyu; Kim, Hyunjung; Seo, Hyungtak; Leskela, Markku; Jeon, Hyeongtag

ArticleIssue Date2014Citationphysica status solidi (a) - applications and materials science, v.211, no.9, pp 2166 - 2171PublisherWiley - V C H Verlag GmbbH & Co.
SCISCIESCOPUS
The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applicationsGo to Link

Song, Hyoseok; Jeon, Heeyoung; Shin, Changhee; Shin, Seokyoon; Jang, Woochool; Park, Joohyun; Chang, Jaewan; Choi, Jae Hyoung; Kim, Younsoo; Lim, HanJin, et al.

ArticleIssue Date2016CitationThin Solid Films, v.619, pp 317 - 322PublisherElsevier Sequoia
SCISCIESCOPUS
The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacerGo to Link

Jang, Woochool; Jeon, Heeyoung; Song, Hyoseok; Kim, Honggi; Park, Jingyu; Kim, Hyunjung; Jeon, Hyeongtag

ArticleIssue Date2015Citationphysica status solidi (a) - applications and materials science, v.212, no.12, pp 2785 - 2790PublisherWiley - V C H Verlag GmbbH & Co.
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