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High-Temperature Stable Amorphous Sn-Rich InSnGaO Thin Films Fabricated Via Atomic Layer Deposition for Next-Generation Dynamic Random-Access Memory ApplicationsGo to Link

Ryu, Seong-Hwan; Kim, Hye-Mi; Lee, Kwang-Hee; Sung, Ha-Jun; Yang, Jee-Eun; Kim, Sangwook; Park, Jin-Seong

ArticleIssue Date2024CitationNano Letters, v.24, no.50, pp 16039 - 16046PublisherAmerican Chemical Society
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